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Chemická depozice diamantových tenkých vrstev z par plynů
Kromka, Alexander
2022 - Czech
Příprava diamantových vrstev a jejich (nano-) struktur vyžaduje zvládnutí více technologických kroků. V prvním kroku „diamantové technologie” je důležité aktivovat povrch nediamantové podložky vhodným procesem známým jako nukleace nebo zárodkování. Nejčastěji se jedná o proces pokrytí povrchu podložky (nano-) částicemi diamantu nebo aktivace povrchu podložky iontovým bombardováním. Druhým klíčovým krokem je samotný růst diamantové vrstvy tzv. chemickou depozicí z par plynů (tzv. „Chemical Vapor Deposition” - CVD) za nízkých tlaků (10 ÷ 10 000 Pa) a teplot v rozsahu 250 ÷ 1000 °C, která je nejčastěji realizována v plynné směsi metanu a vodíku v systému žhaveného vlákna nebo mikrovlnného plazmatu. V tomto příspěvku jsou oba technologické kroky, nukleace a růst, diskutovány se zřetelem aktuálních trendů a experimentálních aktivit probíhajících v laboratořích Fyzikálního ústavu AV ČR (FZÚ).\n The preparation of diamond layers and their (nano-) structures requires the optimization of several technological steps. In the first step of “diamond technology” it is important to activate the surface of the non-diamond substrate by a suitable process known as nucleation or nucleation. The second key step is the growth of the diamond layer itself by chemical vapor deposition (CVD) under low pressures (10 ÷ 10,000 Pa) and temperatures in the range of 250 ÷ 1000 °C, and from a gas mixture of methane and hydrogen commonly used in a hot filament or microwave plasma CVD systems. In this paper, both technological steps, nucleation and growth, are discussed in light of current trends and experimental activities taking place in the laboratories of the Institute of Physics of the Academy of Sciences of the Czech Republic (FZÚ).
Keywords:
diamond technology; nucleation; chemical vapor deposition
Available at various institutes of the ASCR
Chemická depozice diamantových tenkých vrstev z par plynů
Příprava diamantových vrstev a jejich (nano-) struktur vyžaduje zvládnutí více technologických kroků. V prvním kroku „diamantové technologie” je důležité aktivovat povrch nediamantové podložky vhodným ...
Effect of molecular structure on liquid crystalline behaviour for chiral lactic acid derivatives
Mironov, Sergei; Bubnov, Alexej
2022 - English
Liquid crystals are self-organizing materials that have great potential for practical applications. The relationship has not been fully established and understood despite numerous studies. We discuss a relatively broad subclass of calamitic chiral lactic acid derivatives and provide specific examples of effective tuning of their mesomorphic and electro-optical behaviour using various types of lateral substitution placed on the molecular core.
Keywords:
chiral liquid crystals; lateral substitution; ferroelectric smectic phase; spontaneous polarization; lactic acid
Available at various institutes of the ASCR
Effect of molecular structure on liquid crystalline behaviour for chiral lactic acid derivatives
Liquid crystals are self-organizing materials that have great potential for practical applications. The relationship ...
Plasma-synthesised zinc oxide nanoparticle behavior in liquids
Rutherford, D.; Jíra, J.; Kolářová, Kateřina; Matolínová, I.; Remeš, Zdeněk; Kuliček, J.; Padmanaban, D.; Maguire, P.; Mariotti, D.; Rezek, B.
2021 - English
ZnO nanoparticles have been synthesized using non-thermal atmospheric pressure plasma (ZnO-NTP). We investigated the behavior of these ligand-free as a colloid suspension using different solvents, from deionized water to physiological saline and microbial culture broth. We found that the zeta potential of ZnONTP became more negative after exposure to microbial culture broth relative to water, which suggests increased colloid stability. Photoluminescence spectra of ZnO-NTP were similar regardless of liquid type, yet optical and fluorescent images of samples showed different agglomeration behaviour depending on liquid type. Scanning electron microscopy images revealed large agglomerates of ZnO-NTP interacting with the surface of bacteria cells, ranging in size from 200 nm up to 2 µm. We also studied effect of sub-lethal concentrations of ZnO-NTP on bacteria under illumination. There was no significant difference in viable bacteria concentration after 24h exposure to 10 µg/mL ZnO-NTP.
Keywords:
zinc oxide; nanotechnology; colloid suspension; bacteria
Available at various institutes of the ASCR
Plasma-synthesised zinc oxide nanoparticle behavior in liquids
ZnO nanoparticles have been synthesized using non-thermal atmospheric pressure plasma (ZnO-NTP). We investigated the behavior of these ligand-free as a colloid suspension using different solvents, ...
Radical-based tuning the surface functionality of MXene
Olshtrem, A.; Chertopalov, Sergii; Guselnikova, O.; Švorčík, V.; Lyutakov, O.
2021 - English
The family of MAX phases and their derivative MXenes are continuously growing in terms of both crystalline and composition varieties. MXenes are a new family of two-dimensional (2D) transition metal carbides, carbonitrides and nitrides, with a general formula Mn+1AXn, where n = 1–3, M denotes a transition metal, A is an element such as aluminum or silicon, and X is either carbon or nitrogen. Considering the various elemental composition possibilities, surface functional tunability, various magnetic orders, and large spin–orbit coupling, MXene can truly be considered as multifunctional materials that can be used to realize highly correlated phenomena.
Keywords:
chemical transformation; MXene; surface grafting; tuned functionalization
Available at various institutes of the ASCR
Radical-based tuning the surface functionality of MXene
The family of MAX phases and their derivative MXenes are continuously growing in terms of both crystalline and composition varieties. MXenes are a new family of two-dimensional (2D) transition metal ...
Nanostructured layer enhancing light extraction from GaN-based scintillator using MOVPE
Vaněk, Tomáš; Hubáček, Tomáš; Hájek, František; Dominec, Filip; Pangrác, Jiří; Kuldová, Karla; Oswald, Jiří; Hospodková, Alice
2021 - English
Light extraction (LE) efficiency of GaN buffer layer was studied by angle-resolved photoluminescence. We measured enhancement of light extraction efficiency (LEE) up to 154% by introducing the SiNx layer atop the GaN buffer and subsequent GaN light extraction layer (LEL) overgrowth. Morphological properties of GaN.
Keywords:
MOVPE; GaN; light extraction; SiNx; scintillator
Available at various institutes of the ASCR
Nanostructured layer enhancing light extraction from GaN-based scintillator using MOVPE
Light extraction (LE) efficiency of GaN buffer layer was studied by angle-resolved photoluminescence. We measured enhancement of light extraction efficiency (LEE) up to 154% by introducing the SiNx ...
Effect of the substrate crystalline orientation on the surface morphology and boron incorporation into epitaxial diamond layers
Voves, J.; Pošta, A.; Davydova, Marina; Laposa, A.; Povolný, V.; Hazdra, P.; Lambert, Nicolas; Sedláková, Silvia; Mortet, Vincent
2021 - English
Epitaxial growth of diamond is critically important for the fabrication of diamond-based electronic devices. The emerging study of the epitaxial diamond growth on the (113) vicinal surfaces evidences highly needed high growth rates and low structural defects concentrations with both p- and n-type doping. In this work, we compare the morphology and dopant concentration incorporation of heavily boron-doped (113) epitaxial diamond layers with conventionally studied (100) and (111) epitaxial layers. Epitaxial layers were grown using resonance cavity Microwave Plasma Enhanced Chemical Vapor Deposition (MWPECVD) system. The surface morphology of epitaxial layers was studied by optical microscopy and atomic force microscopy, whereas the boron incorporation homogeneity was determined by Raman spectroscopy mapping.
Keywords:
diamond; epitaxy; defects; boron doping; Raman mapping
Available at various institutes of the ASCR
Effect of the substrate crystalline orientation on the surface morphology and boron incorporation into epitaxial diamond layers
Epitaxial growth of diamond is critically important for the fabrication of diamond-based electronic devices. The emerging study of the epitaxial diamond growth on the (113) vicinal surfaces evidences ...
General overview of GaN devices and transport properties of AlGaN/GaN HEMT structures - impact of dislocation density and improved design
Hulicius, Eduard; Hájek, František; Hospodková, Alice; Hubík, Pavel; Gedeonová, Zuzana; Hubáček, Tomáš; Pangrác, Jiří; Kuldová, Karla
2021 - English
GaN-based nanostructures are used for many present semiconductor devices. The main topics are structures for blue LEDs and LDs, but there are also other interesting and important GaN devices namely for power electronics, scintillators and detectors as well as High Electron Mobility Transistors (HEMT). Reduction of dislocation density considerably increases electron mobility in 2DEG. All presented results support our expectation that a suitably designed AlGaN back barrier can help to prevent this phenomenon.
Keywords:
GaN devices; HEMT; MOVPE epitaxy; dislocation
Available at various institutes of the ASCR
General overview of GaN devices and transport properties of AlGaN/GaN HEMT structures - impact of dislocation density and improved design
GaN-based nanostructures are used for many present semiconductor devices. The main topics are structures for blue LEDs and LDs, but there are also other interesting and important GaN devices namely ...
Time-lapse monitoring of cell mechanical properties
Přibyl, J.; Rotrekl, V.; Pešl, M.; Jelínková, Š.; Kratochvílová, Irena
2021 - English
Atomic force microscopy (AFM) is a highly sensitive non-invasive surface method able to provide insight into cells' mechanical parameters. Membrane and sub-membrane development, as well as internal cellular properties, can be monitored. The stiffness of cells is a fundamental phenomenon that reflects changes in cell physiology. More importantly, changes in cell mechanical properties are also often found to be closely associated with various disease conditions. Cell mechanics are mainly dependent on cytoskeletal architecture. The development of cryopreserved cells' mechanical properties (stiffness) after thawing was studied using AFM.\n
Keywords:
atomic force microscopy; mechanical Mapping; cell stiffness; cryopreservation
Available at various institutes of the ASCR
Time-lapse monitoring of cell mechanical properties
Atomic force microscopy (AFM) is a highly sensitive non-invasive surface method able to provide insight into cells' mechanical parameters. Membrane and sub-membrane development, as well as internal ...
Plasma hydrogenation of hydrothermally grown ZnO micropods
Remeš, Zdeněk; Aubrechtová Dragounová, Kateřina; Mičová, J.
2021 - English
The hydrothermally grown ZnO micropods have been placed on grounded stainless-steel holder and exposed to an inductively coupled plasma (ICP) monitored in-situ by optical emission spectroscopy (OES). OES shows the immediate release of oxygen during Ar ion bombardment. The prolonged exposure to hydrogen plasma leads to deterioration of the optical properties as well. The exposure, rf power and hydrogen pressure have been optimized to enhance UV-photoluminescence peak at the wavelength 384 nm related to surface bounded excitons and reduce the defect-related photoluminescence in red spectral range. The strong UV photoluminescence appears just after 1 minute of plasma hydrogenation in a radio frequency plasma discharge with power density 40 W/dm3 and hydrogen pressure 17 Pa.
Keywords:
ZnO; micropods; inductively coupled plasma; optical emission spectroscopy; photoluminescence spectroscopy; Raman spectroscopy; infrared absorption spectroscopy
Available at various institutes of the ASCR
Plasma hydrogenation of hydrothermally grown ZnO micropods
The hydrothermally grown ZnO micropods have been placed on grounded stainless-steel holder and exposed to an inductively coupled plasma (ICP) monitored in-situ by optical emission spectroscopy (OES). ...
Growth and properties of diamond films prepared on 4-inch substrates by cavity plasma systems
Babčenko, Oleg; Potocký, Štěpán; Aubrechtová Dragounová, Kateřina; Szabó, Ondrej; Bergonzo, P.; Rezek, B.; Kromka, Alexander
2021 - English
We compare two microwave (2.45 GHz) plasma systems with ellipsoidal and multimode clamshell cavity for diamond synthesis by chemical vapor deposition. We use H2/CH4/CO2 gas mixture for diamond film deposition on Si <100> wafers. Both systems are capable of high pressure (up to 20 kPa) operation and high growth rates (several µm/h). We compare the cavity systems from the point of diamond quality (Raman shift measurement), substrate size (2” versus 4”) and grown film homogeneity together with surface morphology (SEM), deposition rate and parasitic doping levels (photoluminescence).
Keywords:
large area diamond; microwave cavity plasma; high-power density plasma
Available at various institutes of the ASCR
Growth and properties of diamond films prepared on 4-inch substrates by cavity plasma systems
We compare two microwave (2.45 GHz) plasma systems with ellipsoidal and multimode clamshell cavity for diamond synthesis by chemical vapor deposition. We use H2/CH4/CO2 gas mixture for diamond film ...
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