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Zajištění plošné homogenity při depozici složitých systémů vrstev
Žídek, Karel
2018 - Czech
V této zprávě popisujeme postup optimalizace depozice interferenčního filtru s cílem dosáhnout homogenní tloušťky vrstvy na co největším rozsahu deponované plochy. Za použití depoziční masky a rotace depoziční kaloty dosahujeme homogenity ± 0.5% pro vzorky do průměru 5 cm. Zkoumáme poté vliv naklonění substrátu a depozici na zakřivený povrch čočky na homogenitu deponované vrstvy. We report on a procedure of optimization of a thin-film deposition process with respect to the best attainable layer homogeneity on a large deposited surface. By using a deposition mask and rotation of the deposition calotte, we reach the homogeneity of ± 0.5% for samples with the diameter up to 5 cm. Furthermore, we investigate the effect of substrate tilt and of a deposition on a curved lens surface with respect to homogeneity of the deposited layer.
Keywords:
thin layer deposition; deposition mask; surface homogeneity
Available at various institutes of the ASCR
Zajištění plošné homogenity při depozici složitých systémů vrstev
V této zprávě popisujeme postup optimalizace depozice interferenčního filtru s cílem dosáhnout homogenní tloušťky vrstvy na co největším rozsahu deponované plochy. Za použití depoziční masky a rotace ...
Alternative Methods of Permeation Barriers Preparation
Veverka, Jakub; Matějíček, Jiří
2018 - English
Permeation barriers represent one of the crucial fields in materials development for thermonuclear fusion. Primary objective of the barriers is to suppress the permeation of hydrogen isotopes (mainly tritium) from future thermonuclear fusion facilities. Secondary objective is to reduce their retention in structural materials. Expected reactor conditions put high demands on the material, as well as on the final barrier quality. Key properties are tritium permeation reduction, absence of defects (especially cracks), high-temperature stability and corrossion resistance, and compatibility with structural materials (mostly ferritic-martensitic steels). Thin nitride layers, identified as promising permeation barriers, were prepared by diffusion-based nitridation and physical vapour deposition (PVD), and characterized.
Keywords:
Permeation barriers; Nitride layers; PVD coating; Permeation measurement
Available at various institutes of the ASCR
Alternative Methods of Permeation Barriers Preparation
Permeation barriers represent one of the crucial fields in materials development for thermonuclear fusion. Primary objective of the barriers is to suppress the permeation of hydrogen isotopes (mainly ...
Feedhorn Coating - research report
Václavík, Jan
2017 - English
The report contains a description of the developed methods for metalizing of prototype of the FEEDHORN demonstrator, which is made up of a specially shaped carbon fiber composite carrier and a CNT layer. The report contains the results and comments for future construction of similar types of devices.
Keywords:
cnt layer; metalization; vacuum evaporation
Available at various institutes of the ASCR
Feedhorn Coating - research report
The report contains a description of the developed methods for metalizing of prototype of the FEEDHORN demonstrator, which is made up of a specially shaped carbon fiber composite carrier and a CNT ...
Sub-Nanosecond Laser Induced Plasma as Water Window Radiation Source.
Vrbová, M.; Vrba, Pavel
2017 - English
Laser plasma created in a krypton gas puff target is studied as a source of radiation in the water window spectral range (lambda= 2.3 - 4.4 nm). The spatial development of the plasma induced by a sub-nanosecond Nd:YAG laser pulse focused on the gas puff target is modeled using 2d RMHD code Z*. Space-time distributions of plasma quantities, namely electron temperature, electron density, mass density and plasma expansion velocity were evaluated. Instantaneous spectra during the laser pulse and during plasma decay period are also calculated. Temporal evolutions of the krypton ions relative populations prove that ions from Kr21+ and Kr22+ are responsible for dominant spectral intensity emitted at a wavelength around lambda= 3 nm. Evaluated time resolved spectra are compared with time integrated spectra obtained experimentally.
Keywords:
RMHD simulations; gas puff; laser plasma water window sources
Available at various institutes of the ASCR
Sub-Nanosecond Laser Induced Plasma as Water Window Radiation Source.
Laser plasma created in a krypton gas puff target is studied as a source of radiation in the water window spectral range (lambda= 2.3 - 4.4 nm). The spatial development of the plasma induced by a ...
Deformation of thin self-standing mask at inhomogeneous irradiation.
Koláček, Karel; Schmidt, Jiří; Frolov, Oleksandr; Štraus, Jaroslav; Chalupský, Jaromír; Choukourov, A.
2017 - English
Flatness of the mask is one of key features influencing the quality of image. Among factors that can affect mask flatness belongs inhomogeneous illumination. This does not apply to lithography, but to experiments that use only discrete parts of mask e.g. for nanostructuring or other type of material research. It is shown that even single EUV laser shot (laser wavelength ~46.9 nm, pulse duration ~1.5 ns, focused pulse energy ~20 .mu.J, peak fluency 48 J/cm2) not only deforms the mask, but also changes mask-substrate distance. In our case two kinds of grids (one circular with rectangular windows 7.5x7.5 μm and bars 5 micro m (period 12.5x12.5 micro m), other rectangular with rectangular windows 3.2x1.2 μm and bars 0.8 micro m (period 4x2 micro m)) were attached to PMMA substrate and exposed to one or five superimposed focused laser shots. The mask (grid) deformation was inferred from the changes of diffraction pattern engraved into PMMA.
Keywords:
interaction of XUV radiation with solid surface; nanostructuring; nanopatterning; XUV diffraction
Available at various institutes of the ASCR
Deformation of thin self-standing mask at inhomogeneous irradiation.
Flatness of the mask is one of key features influencing the quality of image. Among factors that can affect mask flatness belongs inhomogeneous illumination. This does not apply to lithography, but to ...
The role of pre-ionization on EUV capillary laser profile.
Štraus, Jaroslav; Schmidt, Jiří; Koláček, Karel; Frolov, Oleksandr
2017 - English
The profile of EUV capillary laser beam was believed to be an annulus and a corresponding theory for its explanation was generally accepted. Nevertheless, our recent detailed observation shows, that the laser profile can be remarkably influenced by the parameters of pre-pulse, serving for working gas pre-ionisation before introduction the main current into the capillary. The examples of possible profile shapes and corresponding parameters are presented.
Keywords:
Pre-pulse; capillary XUV laser beam profile
Available at various institutes of the ASCR
The role of pre-ionization on EUV capillary laser profile.
The profile of EUV capillary laser beam was believed to be an annulus and a corresponding theory for its explanation was generally accepted. Nevertheless, our recent detailed observation shows, that ...
Application of Electric Probes for Study of Structure of Thermal Plasma Jet.
Hurba, Oleksiy; Hrabovský, Milan
2017 - English
Thermal plasma at atmospheric pressure was investigated. Electric probes and doable probe used as relatively simple and efficient tool for diagnostic of structure of flow field in thermal plasma jet. Were defined plasma potential and boundaries of the conducting region and their changing for the diferent operating modes of plasma torch.
Keywords:
Electric probes; double probe; thermal; plasma jet
Available at various institutes of the ASCR
Application of Electric Probes for Study of Structure of Thermal Plasma Jet.
Thermal plasma at atmospheric pressure was investigated. Electric probes and doable probe used as relatively simple and efficient tool for diagnostic of structure of flow field in thermal plasma jet. ...
Simulace zbytkových optických vad objektivu Merz 124/1477
Rail, Zdeněk; Melich, Zbyněk; Šrajer, Bohdan
2017 - Czech
Tento objektiv byl na Ústavu fyziky plazmatu,v.v.i., Centru Toptec v Turnově restaurován. Během tohoto procesu jsme získali možnost objektiv na optické lavici přeměřit a vyčíslit jeho zbytkové optické vady. Objektiv byl vyroben kolem roku 1860-1870. This objective lens was renoved in the Institute of Plasma Physics, v.v.i. Center Toptec in Turnov. During the process we got a possibility to measure the objective lens on the optical bench and to evaluate its residual optical aberrations. The objective lens was manufactured in 1860-1870 years
Keywords:
Achromatic dublet; spherochromatic aberration; coma; dispersion curve of glass; B-F chromatic correction
Available at various institutes of the ASCR
Simulace zbytkových optických vad objektivu Merz 124/1477
Tento objektiv byl na Ústavu fyziky plazmatu,v.v.i., Centru Toptec v Turnově restaurován. Během tohoto procesu jsme získali možnost objektiv na optické lavici přeměřit a vyčíslit jeho zbytkové optické ...
Optické parametry význačných refraktorů
Rail, Zdeněk; Jareš, Daniel; Pintr, Pavel; Vápenka, David
2017 - Czech
V tomto referátu publikujeme optické parametry několika historických dalekohledů, které jsme v literatuře a na webových stránkách získali. Data byla vložena do optického programu ZEMAX, v němž byly vyčísleny jejich zbytkové vady. In this paper we publish the optical parameters of several historic telescopes, which we have found in scientific literature or web pages. Data were inputed into the optical program ZEMAX, which evaluated their residual aberrations.
Keywords:
Achromatic objective lens; spherochromatic aberration; coma; residual chromatic aberration; Index of refraction; dispersion curve of glass
Available at various institutes of the ASCR
Optické parametry význačných refraktorů
V tomto referátu publikujeme optické parametry několika historických dalekohledů, které jsme v literatuře a na webových stránkách získali. Data byla vložena do optického programu ZEMAX, v němž byly ...
Vývoj řešení optického řešení Prototypu I
Pintr, Pavel
2017 - Czech
Zpráva popisuje vývoj řešení optické soustavy pro Prototyp I. Jedná se o vývoj kolimátoru laserového záření a vývoj freeform optiky pro tvorbu obdélníkového spotu. This report describes a development of optical solution for the Prototype I. There is a development of laser collimator in the firt part of this report. You can find a development of freeform optics in the second part of this report.
Keywords:
freeform; laserhead; mirror; NIR
Available at various institutes of the ASCR
Vývoj řešení optického řešení Prototypu I
Zpráva popisuje vývoj řešení optické soustavy pro Prototyp I. Jedná se o vývoj kolimátoru laserového záření a vývoj freeform optiky pro tvorbu obdélníkového spotu....
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