RF Magnetron Sputtered Ag-Sb-S Amorphous Thin Films
Gutwirth, J.; Wágner, T.; Drašar, Č.; Beneš, L.; Vlček, M.; Hrdlička, M.; Frumar, M.; Schwarz, J.; Tichá, H.; Peřina, Vratislav
2006 - English
Thin Ag-Sb-S films were prepared by RF magnetron sputtering as potential candidates for rewritable optical data storage films. There were prepared polycrystalline bulks of AgSbS2. Composition and homogeneity of these bulks were checked. Targets for RF magnetron sputtering were prepared from pulverized bulks by hot pressing technique. Targets were characterized the same way as bulks. Composition and homogeneity of prepared thin films were characterized by SEM-EDX and RBS/ERDA, amorphous/crystalline character was studied by XRD. Optical properties (spectral dependence of refractive index) were evaluated on basis of UV-Vis-NIR spectroscopy and variable angle spectral ellipsometry (VASE). Crystallization abilities were traced by thermal dependence of optical transmission of prepared thin films. RF magnetronovým naprašováním byly připraveny Ag-Sb-S tenké vrstvy jako potenciální materiál pro optický záznam dat.Složení a homogenita byla zkoumána metodami SEM-EDX, RBS, ERDA, XRD. Optické vlastnosti pomocí UV-vid. spektroskopie a elipsometrie pod proměnlivými úhly. Možnosti krystalizace byly sledovány z teplotní závislosti.
Keywords:
chalcogenides; RF magnetron sputtering; surface analyses
Available at various institutes of the ASCR
RF Magnetron Sputtered Ag-Sb-S Amorphous Thin Films
Thin Ag-Sb-S films were prepared by RF magnetron sputtering as potential candidates for rewritable optical data storage films. There were prepared polycrystalline bulks of AgSbS2. Composition and ...
Deposition of Organosilicon Polymer Thin Films by Plasma Enhanced Chemical Vapor Deposition
Zajíčková, L.; Buršíková, V.; Sťahel, P.; Buršík, Jiří; Peřina, Vratislav; Macková, Anna; Dubroka, A.
2006 - English
doplnit doplnit
Keywords:
organosilicon polymers; PECVD; surface analyses
Available at various institutes of the ASCR
Deposition of Organosilicon Polymer Thin Films by Plasma Enhanced Chemical Vapor Deposition
doplnit
doplnit
Erbium doped gallium nitride thin films
Prajzler, V.; Hüttel, I.; Špirková, J.; Schröfel, J.; Machovič, V.; Peřina, Vratislav
2004 - English
The paper describes the preparation and properties of gallium nitride layers with erbiu content. Práce pojednává o přípravě a vlastnostech galiumnitridových vrstev s obsahem erbia.
Keywords:
thin films; erbium; GaN
Available at various institutes of the ASCR
Erbium doped gallium nitride thin films
The paper describes the preparation and properties of gallium nitride layers with erbiu content.
Práce pojednává o přípravě a vlastnostech galiumnitridových vrstev s obsahem erbia.
Properties of Erbium-Doped Gallium Nitride Films Prepared by RF Magnetron Sputtering in Microwave and Optical Technology
Prajzler, V.; Schröfel, J.; Hüttel, I.; Špirková, J.; Machovič, V.; Oswald, J.; Studnička, V.; Novotná, M.; Peřina, Vratislav
2004 - English
The paper describes the preparation and properties of gallium nitride layers with erbium content. Vlastnosti Galium nitridových vrstev dopovaných erbiem připravených rf magnetronovým naprašováním a jejich vlastnosti v mikrovlnné a optické technologii.
Keywords:
magnetron sputtering; gallium nitride; erbium
Available at various institutes of the ASCR
Properties of Erbium-Doped Gallium Nitride Films Prepared by RF Magnetron Sputtering in Microwave and Optical Technology
The paper describes the preparation and properties of gallium nitride layers with erbium content....
Raman Spectra of Erbium Doped Gallium Nitride Layers Fabricated by Magnetron Sputtering
Prajzler, V.; Schröfel, J.; Hüttel, I.; Špirková, J.; Machovič, V.; Hamáček, J.; Peřina, Vratislav
2004 - English
The paper presents the influence of erbium ions content in gallium nitride layers on RAMAN spectra. Práce prezentuje vliv přítomnosti erbiových iontů v galium nitridových vrstvách na Ramanovská spektra.
Keywords:
Raman spectra; erbium; GaN
Available at various institutes of the ASCR
Raman Spectra of Erbium Doped Gallium Nitride Layers Fabricated by Magnetron Sputtering
The paper presents the influence of erbium ions content in gallium nitride layers on RAMAN spectra....
Carbon planar waveguides for integrated optics
Prajzler, V.; Hüttel, I.; Špirková, J.; Schröfel, J.; Machovič, V.; Gurovič, J.; Peřina, Vratislav
2004 - English
The paper describes the fabrication of carbon layers and their potential usage for integrated optics. Práce popisuje přípravu a vlastnosti uhlíkových vrstev a jejich možné použití pro integrovanou optiku.
Keywords:
carbon planar waveguides; integrated optics
Available at various institutes of the ASCR
Carbon planar waveguides for integrated optics
The paper describes the fabrication of carbon layers and their potential usage for integrated optics....
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